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Visualizing the effects of plasma treatment in color! Ceramic type

It changes color continuously according to the intensity and duration of the plasma treatment, allowing the effects of the plasma treatment to be visualized in color.

As an evaluation tool for plasma treatment effects, "PLAZMARK(R)" has expanded its lineup since its launch in 2014 to meet customer needs. Now, as the first product for wafer processes that has been highly requested, we introduce the 'PLAZMARK(R) "Wafer Type" Ceramic Version'! It can be used for evaluating in-plane distribution in wafer processes such as etching and ashing of electronic devices. 【Features】 ■ Achieves high heat resistance (400℃) ■ Clean design suitable for processes such as LED and MEMS ■ Two types of substrates available: silicon and sapphire *For more details, please refer to the materials. Feel free to contact us with any inquiries.

  • Wafer

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